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Parametric Test Systems Precise high speed measurements with automated probe stations
S530 Parametric Test Systems are designed for production and lab environments that must handle a broad range of devices and technologies, offering industry-leading test plan flexibility, automation, probe station integration, and test data management capabilities. Keithley has brought more than 30 years of expertise in delivering a wide range of standard and custom parametric testers to customers around the world to the design of these test solutions.
| Features |
• Readily adaptable to new devices and test requirements
• Fast, flexible, interactive test plan development
• Compatible with popular fully automation probe stations
• Options for 1kV, C-V, pulse generation, frequency measurements, and low-voltage measurements
• Compatible with Keithley's Model 9139A Probe Card Adapter
• Supports reuse of existing five-inch probe card libraries
• Proven instrumentation technology ensures high measurement accuracy and repeatability in both the lab and the fab
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| Quick Selector Guide |
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| Model |
Information |
| S530 Low Current System |
- Source up to 200V or 1A
- Measure current with femto-amp resolution and sub pico-amp offset
- 2 to 8 SMU Channels
- Option for C-V, pulse sourcing, frequency measurements and low voltage measurements
- Up to 60 pins full Kelvin plus connection for chunk
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| S530 High Voltage System |
- Source up to 1000V or 1A
- Use 200V SMU to measure current with femto-amp resolution and picoamp offset
- Use 1000V SMU to measure current with ten pico-amp resolution and nano-amp offset
- 3 to 7 SMU channels1
- Options for C-V, pulse sourcing, frequency measurements, and lowvoltage measurements
- Up to 24 pins full Kelvin plus connection for chuck
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