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Non-Volatile Memory
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4200-SCS Software
The 4200-SCS software provides a unified measurement interface that guides you through complex characterization tests. Example non-volatile memory projects are included for many memory types so you can set up and execute tests quickly, as well as to analyze the data. The 4200-SCS provides real-time I-V, C-V and Pulse measurements so you can understand device behavior quickly. Floating Gate Flash Flash memory characterization consists of determining values for voltage pulse height, pulse width for the memory device program and erase states. The 4200-SCS KITE software provides NAND or NOR cell application tests that measure Vt of the flash memory transistor, endurance tests and program/erase tests. Phase-change Memory Through application of heat in the form of an electrical pulse, phase-change memory cells can be switched rapidly from a low to high resistance state. The challenge to testing a new or unknown cell is to determine the appropriate pulse parameters for RESET and SET pulses. The 4200-SCS KITE software provides application tests that provides RESET and SET pulses, I-V curves, R-I curves and endurance testing. Ferro-electric Memory FeRAM memory mechanism is based on a polarization shift in ferro-electric materials. The challenge of characterizing the FeRAM is the switching of states requires the polarization charge to be measured as it changes. The 4200-SCS solution measures the voltage and currently directly and simultaneously so that the total charge can be determined. The 4200-SCS provides FeRAM application tests for PUND waveform generation and measurement, FeRAM hysteresis curve and endurance testing. ReRAM Memory ReRAM memory mechanism is based on the idea that a dielectric, which is normally insulating, can be made to conduct through a filament or conduction path formed after application of a sufficiently high voltage. Once the filament is formed, it may be reset or set by an appropriately applied voltage. ReRAM is typically tested in the DC realm using SMU instruments, but SMUs may not be the best instruments. In traditional ReRAM test setups, to create, or form, the low resistance state initially, SMU current compliance is used to limit the maximum current flowing through the test device during the forming or reset operation. However, the compliance circuit in an SMU is not instantaneous, and takes microseconds to milliseconds to engage fully. Pulse I-V characterization improves ReRAM testing by providing strict timing control of the voltage signal applied to the test device. ReRAM tests that are included in the 4200-SCS are:
4200-SCS Parameter Analyzer Mainframe The 4200-SCS is a modular, fully integrated parameter analyzer that performs electrical characterization of devices, materials or processes. With nine measurement slots and a built-in low noise ground unit, you can configure it to precisely meet your test requirements or budget constraint. Ultra-Fast I-V Modules Each Model 4225-PMU module provides two channels of integrated sourcing and measurement but occupies only a single slot in the Model 4200-SCS's nine-slot chassis. Unlike competitive solutions, each channel of the Model 4225-PMU combines high speed voltage outputs (with pulse widths ranging from 60 nanoseconds to DC) with simultaneous current and voltage measurements. Each 4200-SCS chassis can accommodate up to six Model 4225-PMU modules, for a maximum of twelve ultra-fast source and measure channels. The Model 4225-PMU can be used to perform three types of ultra-fast I-V tests: Pulsed I-V, Transient I-V, and Pulsed Sourcing. Pulse and transient measurements add a time domain dimension to your analysis and allows for dynamic characteristics to be explored. Using pulsed I-V signals to characterize devices rather than DC signals makes it possible to study or reduce the effects of self-heating or minimize current drift due to trapped charge. Pulsed sourcing can also be used to stress test a device during reliability cycling or program & erase memory devices. SMU Modules SMUs are precision instruments which are used for sourcing current or voltage and simultaneously measuring current and voltage with high accuracy and speed. Two SMU models are available for use with the 4200-SCS, the 4200-SMU medium power SMU or 4210-SMU high power SMU. Both models occupy only one instrument slot and up to a total of nine can be installed in the 4200-SCS. Offering the industry’s widest dynamic range, the medium power 4200-SMU operates from 100 nA to 100 mA and 1 uV to 210 V and the high power 4210-SMU operates up to 1 A. The low current measurement capabilities of either SMU can be extended to 0.1 fA resolution by adding an optional preamplifier. Remote Amplifier/Switch Units The low current measurement capabilities of the Ultra-fast I-V module can be extended by adding the 4225-RPM. Additionally, the RPM acts as a multiplex switch, allowing you to automatically switch between SMUs, C-V or Ultra-fast I-V modules. MMPC Cables One of the most difficult problems when making I-V, C-V and Pulsed I-V measurements is that the cables required for each measurement type are fundamentally different. Guarding is necessary to achieve low current I-V measurements, which makes triaxial cables necessary. C-V measurements use four coaxial cables with the outer shells connected together. Pulsed measurements require the highest bandwidth of the three measurement types, so the cable must have a characteristic impedance that matches the source impedance to prevent reflections. Multi-Measurement Performance Cables (MMPC) simplifies switching between DC I-V, C-V, and pulsed I-V testing configurations. No matter what type of measurement is being made, you won’t have to change the probe manipulator cabling just move the cables from one instrument module to another. In addition, you can change the setup while the probe needles stay in contact with a wafer, reducing pad damage and maintaining the same contact impedance for all three types of measurements. MMPC Cables are available for select Cascade Microtech, Suss, Lucas Signatone and Wentworth probe stations. Probe Station The 4200-SCS can control external equipment such as an automated or semi-automated probe stations, temperature controllers etc. Probe drivers are supplied with the 4200-SCS for select Cascade Microtech, Suss, MicroManipulator and Signatone probe stations. Device Under Test (DUT) The 4200-SCS is capable of testing many types of non-volatile memory devices such as:
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