Key Performance Specifications
I-V Source Measure Units (SMUs)

  • ±210 V/100 mA or ±210 V/1 A modules
  • 100 fA measure resolution
  • 10 aA measure resolution with optional preamp
  • 10 mHz – 10 Hz very low frequency capacitance measurements
  • 100 µF load capacitance
  • 4-quadrant operation
  • 2 or 4-wire connections

C-V Multi-frequency Capacitance Units (CVUs)

  • AC impedance measurements (C-V, C-f, C-t)
  • 1 kHz – 10 MHz frequency range
  • ±30 V (60 V differential) built-in DC bias, expandable to ±210 V (420 V differential)
  • Simple switching between I-V and C-V measurements with the optional CVIV Multi-Switch

Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)

  • Two independent or synchronized channels of high-speed pulsed I-V source and measure
  • 200 MS/s, 5 ns sampling rate
  • ±40 V (80 Vp-p), ±800 mA
  • Transient waveform capture mode
  • Arbitrary waveform generator for multi-level pulse waveform with 10 ns programmable resolution

High Voltage Pulse Generator Unit (PGU)

  • Two channels of high-speed pulsed V source
  • ±40 V (80 Vp-p ), ±800 mA
  • Arbitrary waveform generator Segment ARB® mode for multi-level pulse waveform with 10 ns programmable resolution

I-V/C-V Multi-Switch Module (CVIV)

  • Easily switch between I-V and C-V measurements without re-cabling or lifting prober needles
  • Move the C-V measurement to any terminal without re-cabling or lifting prober needles
  • ±210 V DC bias capable

 

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